Maher, M. A. Micromachining and Microfabrication Process Technology XIV. SPIE Digital Library.
Chicago Style (17. basım) AtıfMaher, Mary Ann. Micromachining and Microfabrication Process Technology XIV. SPIE Digital Library.
MLA (9th ed.) AtıfMaher, Mary Ann. Micromachining and Microfabrication Process Technology XIV. SPIE Digital Library.
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