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Micromachining and Microfabrication Process Technology XIV

Бібліографічні деталі
Інші автори:	Maher, Mary Ann
Формат:	Електронний ресурс eКнига
Мова:	Англійська
Опубліковано:	SPIE Digital Library, 2/13/09
Предмети:	Conference papers and proceedings.
Онлайн доступ:	Full text available on Research4Life (SPIE Digital Library)

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