Kullberg, R. Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII. SPIE Digital Library.
Chicago Style (17. basım) AtıfKullberg, Richard. Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII. SPIE Digital Library.
MLA (9th ed.) AtıfKullberg, Richard. Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII. SPIE Digital Library.
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