APA (7th ed.) Zitazioa

Allgair, J. Metrology, Inspection, and Process Control for Microlithography XXIII. SPIE Digital Library.

Chicago Style (17th ed.) Zitazioa

Allgair, John. Metrology, Inspection, and Process Control for Microlithography XXIII. SPIE Digital Library.

MLA (9th ed.) Zitazioa

Allgair, John. Metrology, Inspection, and Process Control for Microlithography XXIII. SPIE Digital Library.

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