Allgair, J. Metrology, Inspection, and Process Control for Microlithography XXIII. SPIE Digital Library.
Chicago Style (17. basım) AtıfAllgair, John. Metrology, Inspection, and Process Control for Microlithography XXIII. SPIE Digital Library.
MLA (9th ed.) AtıfAllgair, John. Metrology, Inspection, and Process Control for Microlithography XXIII. SPIE Digital Library.
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