APA (7th ed.) Citation

Henderson, C. Advances in Resist Materials and Processing Technology XXVI. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Henderson, Clifford. Advances in Resist Materials and Processing Technology XXVI. SPIE Digital Library.

MLA (9th ed.) Citation

Henderson, Clifford. Advances in Resist Materials and Processing Technology XXVI. SPIE Digital Library.

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