Wei, Y. Advanced Processes for 193-nm Immersion Lithography. SPIE Digital Library.
Chicagoスタイル(17版)引用形式Wei, Yayi. Advanced Processes for 193-nm Immersion Lithography. SPIE Digital Library.
MLA(9版)引用形式Wei, Yayi. Advanced Processes for 193-nm Immersion Lithography. SPIE Digital Library.
警告: この引用は必ずしも正確ではありません.