Lin, B. J. Optical Lithography: Here Is Why. SPIE Digital Library.
Cita Chicago (17th ed.)Lin, Burn J. Optical Lithography: Here Is Why. SPIE Digital Library.
Cita MLA (9th ed.)Lin, Burn J. Optical Lithography: Here Is Why. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.