Behringer, U. 25th European Mask and Lithography Conference. SPIE Digital Library.
Chicago Style (17. basım) AtıfBehringer, Uwe. 25th European Mask and Lithography Conference. SPIE Digital Library.
MLA (9th ed.) AtıfBehringer, Uwe. 25th European Mask and Lithography Conference. SPIE Digital Library.
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