Maher, M. A. Micromachining and Microfabrication Process Technology XV. SPIE Digital Library.
Tohutoru Kātū Chicago (17th ed.)Maher, Mary Ann. Micromachining and Microfabrication Process Technology XV. SPIE Digital Library.
Tohutoro MLA (9th ed.)Maher, Mary Ann. Micromachining and Microfabrication Process Technology XV. SPIE Digital Library.
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