APA (7th ed.) Zitazioa

Maher, M. A. Micromachining and Microfabrication Process Technology XV. SPIE Digital Library.

Chicago Style (17th ed.) Zitazioa

Maher, Mary Ann. Micromachining and Microfabrication Process Technology XV. SPIE Digital Library.

MLA (9th ed.) Zitazioa

Maher, Mary Ann. Micromachining and Microfabrication Process Technology XV. SPIE Digital Library.

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