Maher, M. A. Micromachining and Microfabrication Process Technology XV. SPIE Digital Library.
Lua i Stíl Chicago (17ú heag.)Maher, Mary Ann. Micromachining and Microfabrication Process Technology XV. SPIE Digital Library.
Lua MLA (9ú heag.)Maher, Mary Ann. Micromachining and Microfabrication Process Technology XV. SPIE Digital Library.
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