La Fontaine, B. Extreme Ultraviolet (EUV) Lithography. SPIE Digital Library.
Cita Chicago (17th ed.)La Fontaine, Bruno. Extreme Ultraviolet (EUV) Lithography. SPIE Digital Library.
Cita MLA (9th ed.)La Fontaine, Bruno. Extreme Ultraviolet (EUV) Lithography. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.