APA (7th ed.) Citation

Raymond, C. Metrology, Inspection, and Process Control for Microlithography XXIV. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Raymond, Christopher. Metrology, Inspection, and Process Control for Microlithography XXIV. SPIE Digital Library.

MLA (9th ed.) Citation

Raymond, Christopher. Metrology, Inspection, and Process Control for Microlithography XXIV. SPIE Digital Library.

Advarsel: Disse citationer er muligvist ikke 100% nøjagtige.