Allen, R. Advances in Resist Materials and Processing Technology XXVII. SPIE Digital Library.
Chicago (17e ed.) BronvermeldingAllen, Robert. Advances in Resist Materials and Processing Technology XXVII. SPIE Digital Library.
MLA (9e ed.) BronvermeldingAllen, Robert. Advances in Resist Materials and Processing Technology XXVII. SPIE Digital Library.
Let op: Deze citaties zijn niet altijd 100% accuraat.