APA (7th ed.) Citation

Allen, R. Advances in Resist Materials and Processing Technology XXVII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Allen, Robert. Advances in Resist Materials and Processing Technology XXVII. SPIE Digital Library.

MLA (9th ed.) Citation

Allen, Robert. Advances in Resist Materials and Processing Technology XXVII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.