APA ציטוט

Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena. AVS: Science & Technology of Materials, Interfaces, and Processing.

Chicago Style (17th ed.) Citation

Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena. AVS: Science & Technology of Materials, Interfaces, and Processing.

ציטוט MLA

Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena. AVS: Science & Technology of Materials, Interfaces, and Processing.