Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena. AVS: Science & Technology of Materials, Interfaces, and Processing.
Cita Chicago (17th ed.)Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena. AVS: Science & Technology of Materials, Interfaces, and Processing.
Cita MLA (9th ed.)Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena. AVS: Science & Technology of Materials, Interfaces, and Processing.
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