Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena. AVS: Science & Technology of Materials, Interfaces, and Processing.
Style de citation Chicago (17e éd.)Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena. AVS: Science & Technology of Materials, Interfaces, and Processing.
Style de citation MLA (9e éd.)Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena. AVS: Science & Technology of Materials, Interfaces, and Processing.
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