Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena. AVS: Science & Technology of Materials, Interfaces, and Processing.
Citação norma ChicagoJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena. AVS: Science & Technology of Materials, Interfaces, and Processing.
Citação norma MLAJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena. AVS: Science & Technology of Materials, Interfaces, and Processing.
Nota: a formatação da citação pode não corresponder 100% ao definido pela respectiva norma.