Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena. AVS: Science & Technology of Materials, Interfaces, and Processing.
Чикаго стиль цитування (17-те видання)Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena. AVS: Science & Technology of Materials, Interfaces, and Processing.
Стиль цитування MLA (9-ме видання)Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena. AVS: Science & Technology of Materials, Interfaces, and Processing.
Попередження: стилі цитування не завжди правильні на всі 100%.