Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
| Formato: | Electrónico Revista |
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| Idioma: | inglés |
| Publicado: |
AVS: Science & Technology of Materials, Interfaces, and Processing
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| Subjects: | |
| Acceso en liña: | Full text available on AIP |
| Publicado: | Vol. 9, no. 1 |
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| descrición da copia: | <strong>On-Campus Access:</strong> No User ID or Password Required |
| Descrición Física: | 1 online resource |
| Formato: | Mode of access: Internet |
| ISSN: | 1071-1023 1520-8567 |
| Acceso: | Electronic access restricted to authorized AUW faculty, staff and students |