Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
| Natura: | Elettronico Periodico |
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| Lingua: | inglese |
| Pubblicazione: |
AVS: Science & Technology of Materials, Interfaces, and Processing
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| Soggetti: | |
| Accesso online: | Full text available on AIP |
| Pubblicazione: | Vol. 9, no. 1 |
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| Descrizione del documento: | <strong>On-Campus Access:</strong> No User ID or Password Required |
| Descrizione fisica: | 1 online resource |
| Natura: | Mode of access: Internet |
| ISSN: | 1071-1023 1520-8567 |
| Accesso: | Electronic access restricted to authorized AUW faculty, staff and students |