Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
| Формат: | Электронный ресурс Журнал |
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| Язык: | английский |
| Опубликовано: |
AVS: Science & Technology of Materials, Interfaces, and Processing
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| Предметы: | |
| Online-ссылка: | Full text available on AIP |
| Опубликовано: | Vol. 9, no. 1 |
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| Примечание: | <strong>On-Campus Access:</strong> No User ID or Password Required |
| Объем: | 1 online resource |
| Формат: | Mode of access: Internet |
| ISSN: | 1071-1023 1520-8567 |
| Доступ: | Electronic access restricted to authorized AUW faculty, staff and students |