Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
| Materiálatiipa: | Elektrovnnalaš Áigečála |
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| Giella: | eaŋgalasgiella |
| Almmustuhtton: |
AVS: Science & Technology of Materials, Interfaces, and Processing
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| Fáttát: | |
| Liŋkkat: | Full text available on AIP |
| Almmustuhtton: | Vol. 9, no. 1 |
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| Fuomášahttimat: | <strong>On-Campus Access:</strong> No User ID or Password Required |
| Olgguldas hápmi: | 1 online resource |
| Materiálatiipa: | Mode of access: Internet |
| ISSN: | 1071-1023 1520-8567 |
| Beassan: | Electronic access restricted to authorized AUW faculty, staff and students |