Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
| Materialtyp: | Elektronisk Tidskrift |
|---|---|
| Språk: | engelska |
| Publicerad: |
AVS: Science & Technology of Materials, Interfaces, and Processing
|
| Ämnen: | |
| Länkar: | Full text available on AIP |
| Publicerad: | Vol. 9, no. 1 |
|---|---|
| Beskrivning: | <strong>On-Campus Access:</strong> No User ID or Password Required |
| Fysisk beskrivning: | 1 online resource |
| Materialtyp: | Mode of access: Internet |
| ISSN: | 1071-1023 1520-8567 |
| Tillgång: | Electronic access restricted to authorized AUW faculty, staff and students |