APA (7th ed.) Citation

Journal of Vacuum Science & Technology A. AVS: Science & Technology of Materials, Interfaces, and Processing.

Chicago Style (17th ed.) Citation

Journal of Vacuum Science & Technology A. AVS: Science & Technology of Materials, Interfaces, and Processing.

MLA (9th ed.) Citation

Journal of Vacuum Science & Technology A. AVS: Science & Technology of Materials, Interfaces, and Processing.

Warning: These citations may not always be 100% accurate.