Journal of Vacuum Science & Technology A
| Formatua: | Baliabide elektronikoa Aldizkaria |
|---|---|
| Hizkuntza: | ingelesa |
| Argitaratua: |
AVS: Science & Technology of Materials, Interfaces, and Processing
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| Gaiak: | |
| Sarrera elektronikoa: | Full text available on AIP |
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