Optical and EUV Lithography: A Modeling Perspective

Extreme Ultraviolet (EUV) Lithography VI

Extreme Ultraviolet (EUV) Lithography X

Extreme Ultraviolet (EUV) Lithography II

Extreme Ultraviolet (EUV) Lithography III

Extreme Ultraviolet (EUV) Lithography VIII

Extreme Ultraviolet (EUV) Lithography VII

Extreme Ultraviolet (EUV) Lithography V

Extreme Ultraviolet (EUV) Lithography IV

Extreme Ultraviolet (EUV) Lithography XI

Extreme Ultraviolet (EUV) Lithography XII

Extreme Ultraviolet (EUV) Lithography IX

X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography

Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography

Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications

Optical and EUV Nanolithography XXXVI

Optical Lithography: Here Is Why
‌: Lin, Burn J.

Field Guide to Optical Lithography
‌: Mack, Chris A.

Optical and EUV Nanolithography XXXV

Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II

Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing V

Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI

Chemistry and Lithography
‌: Okoroanyanwu, Uzodinma

Resolution Enhancement Techniques in Optical Lithography
‌: Wong, Alfred Kwok-Kit

EUV and X-ray Optics, Sources, and Instrumentation

EUV, X-Ray, and Neutron Optics and Sources

Damage to VUV, EUV, and X-ray Optics

X-Ray/EUV Optics for Astronomy and Microscopy

Advances in Metrology for X-Ray and EUV Optics

Optical Lithography: Here is Why, Second Edition
‌: Burn, J. Lin

Submicron Lithography I

Lithography for Semiconductor Manufacturing

Lithography Asia 2008

Molecular Theory of Lithography
‌: Okoroanyanwu, Uzodinma

Lithography Process Control
‌: Levinson, Harry J.

Extreme Ultraviolet Lithography
‌: Levinson, Harry J.

Lithography Asia 2009