Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications

Bibliográfalaš dieđut
Eará dahkkit: Weck, Manfred
Materiálatiipa: Elektrovnnalaš E-girji
Giella:eaŋgalasgiella
Almmustuhtton: SPIE Digital Library, 1/11/87
Fáttát:
Liŋkkat:Full text available on Research4Life (SPIE Digital Library)

Geahča maid