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Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII

Detalles Bibliográficos
Otros Autores:	Shea, Herbert
Formato:	Electrónico eBook
Lenguaje:	inglés
Publicado:	SPIE Digital Library, 3/19/14
Materias:	Conference papers and proceedings.
Acceso en línea:	Full text available on Research4Life (SPIE Digital Library)

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