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00000cam a2200000 a 4500 |
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AUWConferenceProceedingsResearch4Life(SPIE)006699 |
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| 020 |
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|a 9780819499745
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| 040 |
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|a BDCtgAUW
|c BDCtgAUW
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| 245 |
0 |
0 |
|h [electronic resource]
|a Advances in Patterning Materials and Processes XXXI
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| 260 |
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1 |
|b SPIE Digital Library,
|c 1/1/14
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| 300 |
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|a 1 online resource
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| 500 |
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|a <strong>On-Campus Access Only (IP based access)</strong>
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| 506 |
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|a Electronic access restricted to authorized AUW faculty, staff and students
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| 538 |
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|a Mode of access: Internet
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| 655 |
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7 |
|a Conference papers and proceedings.
|2 Library of Congress
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| 700 |
1 |
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|a Wallow, Thomas
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| 856 |
4 |
0 |
|z Full text available on Research4Life (SPIE Digital Library)
|u https://login.research4life.org/tacsgr1www_spiedigitallibrary_org/conference-proceedings-of-spie/9051
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