Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X
| Andre forfattere: | |
|---|---|
| Format: | Electronisk eBog |
| Sprog: | engelsk |
| Udgivet: |
SPIE Digital Library,
2/11/11
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| Fag: | |
| Online adgang: | Full text available on Research4Life (SPIE Digital Library) |