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MEMS Design, Fabrication, Characterization, and Packaging

Библиографические подробности
Другие авторы:	Behringer, Uwe
Формат:	Электронный ресурс eКнига
Язык:	английский
Опубликовано:	SPIE Digital Library, 4/30/01
Предметы:	Conference papers and proceedings.
Online-ссылка:	Full text available on Research4Life (SPIE Digital Library)

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по: O'Shea, Donald C.