MOEMS: Micro-Opto-Electro-Mechanical Systems
| Hoofdauteur: | |
|---|---|
| Formaat: | Elektronisch E-boek |
| Taal: | Engels |
| Gepubliceerd in: |
SPIE Digital Library,
1/1/05
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| Onderwerpen: | |
| Online toegang: | Full text available on Research4Life (SPIE Digital Library) |
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Micro-Opto-Electro-Mechanical Systems
Functional Integration of Opto-Electro-Mechanical Devices and Systems
Functional Integration of Opto-Electro-Mechanical Devices and Systems II
Micro-Optics and MOEMS
Nano-Opto-Mechanical Systems (NOMS)
Micro- and Nanofabricated Electro-Optical Mechanical Systems for Biomedical and Environmental Applications
AOPC 2021: Micro-optics and MOEMS
Journal of Micro/Nanolithography, MEMS, and MOEMS
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MOEMS and Miniaturized Systems
Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics
MOEMS and Miniaturized Systems XXII
MOEMS and Miniaturized Systems XIV
MOEMS and Miniaturized Systems XX
MOEMS and Miniaturized Systems XVIII
MOEMS and Miniaturized Systems XVII
MOEMS and Miniaturized Systems XI
MOEMS and Miniaturized Systems II
MOEMS and Miniaturized Systems III
MOEMS and Miniaturized Systems IV
MOEMS and Miniaturized Systems VI
MOEMS and Miniaturized Systems VII
MOEMS and Miniaturized Systems IX
MOEMS and Miniaturized Systems VIII
MOEMS and Miniaturized Systems XV
MOEMS and Miniaturized Systems XIII
MOEMS and Miniaturized Systems XII
MOEMS and Miniaturized Systems X
MOEMS and Miniaturized Systems V
MOEMS and Miniaturized Systems XIX
MOEMS and Miniaturized Systems XVI
MOEMS Display and Imaging Systems