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MEMS, MOEMS, and Micromachining II

Bibliografische gegevens
Andere auteurs:	Urey, Hakan
Formaat:	Elektronisch E-boek
Taal:	Engels
Gepubliceerd in:	SPIE Digital Library, 4/21/06
Onderwerpen:	Conference papers and proceedings.
Online toegang:	Full text available on Research4Life (SPIE Digital Library)

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MEMS/MOEMS Components and Their Applications II

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MEMS/MOEMS Components and Their Applications IV

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Design, Test, Integration, and Packaging of MEMS/MOEMS 2002

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Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V

Microlithography and Metrology in Micromachining II

Micromachined Devices and Components II

MOEMS and Miniaturized Systems II

Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI

Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X

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Micromachining and Microfabrication Process Technology II

Materials and Device Characterization in Micromachining II

MOEMS Display and Imaging Systems II

Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII

MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly

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