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Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII

Bibliographic Details
Other Authors:	Maher, Mary Ann
Format:	Electronic eBook
Language:	English
Published:	SPIE Digital Library, 2/8/07
Subjects:	Conference papers and proceedings.
Online Access:	Full text available on Research4Life (SPIE Digital Library)

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