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MEMS, MOEMS, and Micromachining

X-Ray Micro- and Nano-Focusing: Applications and Techniques II

MEMS/MOEMS Technologies and Applications III

MEMS/MOEMS Technologies and Applications II

Optomechatronic Micro/Nano Devices and Components

MEMS, MOEMS, and Micromachining II

MEMS, MOEMS, and Micromachining III

New Developments in Ultrasonic Transducers and Transducer Systems

Micro-Optics and MOEMS

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Optomechatronic Micro/Nano Devices and Components II

Optomechatronic Micro/Nano Devices and Components III

Optomechatronic Micro/Nano Components, Devices, and Systems

Prototyping Micro-/Nano-Optics with Focused Ion Beam Lithography
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Nanophotonics and Micro/Nano Optics V

Design, Test, and Microfabrication of MEMS and MOEMS

Reliability, Testing, and Characterization of MEMS/MOEMS

ICO20: MEMS, MOEMS, and NEMS

Transducing Materials and Devices

Micro (MEMS) and Nanotechnologies for Space Applications

Design, Test, Integration, and Packaging of MEMS/MOEMS

Reliability, Testing, and Characterization of MEMS/MOEMS III

Reliability, Testing, and Characterization of MEMS/MOEMS II

Nano- and Micro-Metrology

Nano-Micro Letters

AOPC 2021: Micro-optics and MOEMS

The European Physical Journal Special Topics

Topics in Early Childhood Special Education

Topics in Early Childhood Special Education

Topics in Early Childhood Special Education

Design, Test, Integration, and Packaging of MEMS/MOEMS 2001

Design, Test, Integration, and Packaging of MEMS/MOEMS 2002

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI